Can China build its own ASML?

Jun 28, 2026 · 7:45 AM UTC ·16 min read · 0 reactions · 0 comments · 60 views

#technology #semiconductors #china #lithography #industry

TL;DR · WeSearch summary

China is accelerating its effort to produce advanced chips using entirely domestic equipment, as outlined in its 14th Five-Year Plan. While Chinese firms have replaced many foreign tools for processes such as etching and deposition, they still lack homegrown lithography machines, which are dominated by ASML, Canon and Nikon. The high cost and technical complexity of EUV lithography, exemplified by ASML's $350 million high‑NA machines, leaves China dependent on older foreign tools for its most advanced chips.

Key facts

▪SMIC is expanding production of 7‑nm and 14‑nm chips, aiming for a fully domestic supply chain despite a U.S. blacklist.
▪Chinese chipmakers have succeeded in substituting foreign equipment for etching, measurement and polishing, but lithography remains a gap.
▪Lithography tools account for about 25% of global chip‑making equipment spending and are produced only by three companies worldwide.
▪ASML’s high‑NA EUV lithography machine, the most complex and expensive tool at $350 million each, is being trialed by TSMC and Intel and is not yet available in China.

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Canonical URL	https://nikkei.shorthandstories.com/can-china-build-its-own-asml/
Publication time	Sun, 28 Jun 2026 07:45:23 +0000
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Can China build its own ASML? Beijing wants 100% domestic chip equipment, but lithography remains an uphill battle CHENG TING-FANG, LAULY LI, SHUNSUKE TABETA JULY 16, 2025 ASML's manufacturing clean room in Veldhoven, the Netherlands (Video courtesy of ASML) ASML's manufacturing clean room in Veldhoven, the Netherlands (Video courtesy of ASML) Can China build its own ASML? Beijing wants 100% domestic chip equipment, but lithography remains an uphill battle CHENG TING-FANG, LAULY LI, SHUNSUKE TABETA JULY 16, 2025 ASML's manufacturing clean room in Veldhoven, the Netherlands (Video courtesy of ASML) ASML's manufacturing clean room in Veldhoven, the Netherlands (Video courtesy of ASML) In southeastern Beijing, engineers at Semiconductor Manufacturing International Corp., China's top…

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